Instituto de Microelectrónica de Barcelona

English (United Kingdom)
Overview PDF Print E-mail

The general objective is research on electronic and electromechanical properties of nanostructures, with potential to provide new or enhanced functions to nanodevices and nanosystems, as well as advanced methods for nanofabrication.

Specific Objectives are:

- Study of the performance and applicability of nanoelectromechanical systems (NEMS): development of manufacturing methods, transduction methods, system integration and applications. Application of NEMS as nanomechanical sensors, especially in the field of biomedicine.

- Study of the performance and applicability of nanoelectronic devices for applications in circuits and sensors.

- Development of new nanofabrication methods based on top-down techniques (AFM, e-beam, FIB, NIL) and bottom-up synthesis (nanotubes and nanowires). Nanostructure fabrication guided by self-assembled block copolymers. Combination of methods top-down and bottom-up for the future development of micro / nano electronics.

NEMS PDF Print E-mail

Nanomechanical resonators

Silicon nanowires present outstanding properties as mechanical resonators. We have developed processes to fabricate top-down and bottom-up nanowires, and methods to  monolithically integrate nanomechanical resonators in CMOS circuits.

Nanomechanical sensing

Mechanical structures and devices at nanometer scale present enhanced performance as functional sensors. Transduction of the mechanical signal into electrical signal requires smart nanosystem designs.

Nanoelectronic devices for (bio)sensing

This activity has evolved from previous work of one of the senior researchers on silicon-based chemical sensors and biosensors. The research is performed on modified metallic micro- and nano-electrodes and ISFETs, with external collaborations.


Nanofabrication PDF Print E-mail

Top-down nanofabrication

We develop novel methods based on emerging nanolithographies to fabricate nanometer scale structures and devices of  interest for integrated micro/nano systems.

Bottom-up nanofabrication

Bottom-up fabrication is based on using nano-objects as building blocks for fabricating devices and systems, surpassing the limitations of top-down lithography.


AFM methods PDF Print E-mail

Advanced AFM characterization of nanometer scale devices

  • Multifrequency AFM to detect the eigen-modes of carbon nanotube mechanical resonators
  • Electromechanical AFM characterization at wafer-scale level

Tecnology for the fabrication of functional AFM probes

  • Polymeric AFM probes
  • AFM Cantilevers with (insulated) conducting tips


Sede: Campus UAB. Cerdanyola del Vallès. Barcelona. E-08193 (España)
Tel:(+34) 93 594 7700 Fax:(+34) 93 580 0267