Marta Fernández-Regúlez

Dr. Marta Fernández-Regúlez is a Researcher in micro/nanotechnologies for nanoelectronics. Her expertise focuses on bottom-up nanofabrication and nanoelectronic device integration, with over 40 publications in the field.

She obtained her degree in Physics in 2005 from the Universidad De Valladolid and a Master’s in Applied Physics from the same university in 2007. She earned her PhD in Electronic Engineering at UAB in 2012, receiving the Extraordinary PhD Award. Her thesis on Si nanowire growth technologies for nanomechanical devices was conducted at the NanoNEMS group in IMB-CNM, including a predoctoral stay at the University of Berkeley (USA), where she developed a process for selective deposition of catalysts to control Si nanowire growth. This method was applied to grow NW arrays with precise positioning and integrate them into mechanical devices, thermoelectric systems, cell labeling chips, and nanomechanical resonators in collaboration with national and international groups.

In 2013, she shifted to patterning technologies using block copolymers (BCPs) and directed self-assembly (DSA), exploring alternative lithography methods for semiconductor applications. She continued this research at CEA-LETI (France) with a Marie Curie Fellowship, collaborating with industry partners like ASML, STMicroelectronics, and Arkema through the IDEAL consortium, integrating BCPs into pre-industrial lithography lines.

Returning to IMB-CNM in 2016 with a Marie Curie P-SPHERE fellowship, she led BCP-related activities for nanoelectronic devices and NEMS/MEMS fabrication, contributing to national projects Nanointegra and Starsed. She has supervised multiple students and participated in European initiatives, supporting nanoscience research and conducting synchrotron campaigns at European facilities such as ESRF, DESY, Elettra, and Alba. Currently, she leads the national projects SENDESIS and ANVIL, focusing on infiltration of metal oxides in polymers for hybrid functional materials and lithography, supervising a postdoc and a Master’s thesis in this area. She also conducts research on semiconductor quantum devices using BCP and self-assembly, leading the international network DoNQu and co-leading the international project SiDoQu, while supervising two PhD theses in this field. She also works on thermoelectric devices based on BCP-nanostructured Silicon thin films as part of the national project NanoDecoTEG, supervising a PhD thesis.