The activity of the NanoNEMS group is focused on researching novel technological solutions for future generations of semiconductor circuits with a multidimensional approach. It currently explores two challenges:
• Low-power, CMOS-like alternative devices
• Semiconductor based quantum technologies
The research is oriented towards device integration (single-electron transistors and stacked transistors), novel devices based on 2D materials (graphene), state-of-the-art nanopatterning (including block copolymer-based nanolithography and vapor-phase infiltration to improve the performance of lithographic resists), as well as electrical characterization. The activity also includes advanced physical characterization methods.