NEMS devices

Nanomechanical resonators

Silicon nanowires present outstanding properties as mechanical resonators. We have developed processes to fabricate top-down and bottom-up nanowires, and methods to monolithically integrate nanomechanical resonators in CMOS circuits.

Nanomechanical sensing

Mechanical structures and devices at nanometer scale present enhanced performance as functional sensors. Transduction of the mechanical signal into electrical signal requires smart nanosystem designs.